Manufacturing method of semiconductor device, and semiconductor device

ABSTRACT

Provided is a semiconductor device that suppresses the occurrence of defects due to photocorrosion. A method for manufacturing the semiconductor device includes the steps of: forming an insulating layer with a concave portion over a substrate; forming a conductive film over the insulating film and the inside of the concave portion; polishing and removing the conductive film positioned over the insulating layer; and cleaning the insulating layer in a light-shielded state. Between the step of polishing and the step of cleaning, or after the step of cleaning, the substrate SUB is moved by detecting the presence or absence of the substrate SUB in the light-shielded state using an infrared sensor.

CROSS-REFERENCE TO RELATED APPLICATIONS

The disclosure of Japanese Patent Application No. 2013-099894 filed onMay 10, 2013 including the specification, drawings and abstract isincorporated herein by reference in its entirety.

BACKGROUND

The present invention relates to manufacturing methods of semiconductordevices, and semiconductor devices, and more particularly, to atechnique applicable to a manufacturing method of a semiconductor deviceincluding a step of polishing and removing a conductive film, and asemiconductor device manufactured by the same.

One of processes used in a step of forming a wiring layer of asemiconductor device is chemical mechanical polishing (CMP). The outlineof the step using CMP is as follows. First, a concave portion is formedin an insulating layer over a substrate, and a conductive film is formedover the inside of the concave portion and the insulating layer. Then,the conductive film over the insulating layer is polished and removed byuse of a slurry. Thereafter, the substrate is cleaned.

Techniques regarding the CMP include, for example, a technique disclosedin Patent Document 1 and a technique disclosed in Patent Document 2.

As disclosed in Patent Document 1, in forming a copper wiring by the CMPmethod, the copper wiring often undergoes photocorrosion. Further, asdisclosed in Patent Documents 1 and 2, the emission of infrared lightfrom the substrate is detected to determine the state of the CMPprocess.

RELATED ART DOCUMENTS Patent Documents

[Patent Document 1] Japanese Unexamined Patent Publication No.2005-505122

[Patent Document 2] WO 2008/044477

SUMMARY

Some materials for a conductive film can cause the photocorrosion in theconductive film. On the other hand, water is an essential factor in theCMP step. In order to suppress the photocorrosion in the CMP step, aseries of processes needs to be performed in a light-shielded state.However, if the inside of a processor is brought into the light-shieldedstate, it becomes difficult to distinguish between the presence andabsence of the substrate while carrying the substrate.

For this reason, some processors include a light source used fordetermining the presence or absence of the substrate. The light sourceis designed to be lit up only while carrying the substrate. In order tosuppress the photocorrosion, the intensity of light emitted from thelight source is reduced as much as possible. With miniaturization ofwirings, however, defects tend to occur in semiconductor devices due tothe photocorrosion even though the amount of light for detecting thepresence or absence of the substrate is reduced to the minimum necessarylevel. Therefore, a new system is required that can detect the presenceor absence of the substrate.

Other problems and new features of the present invention will beclarified in the following detailed description in connection with theaccompanying drawings.

According to one embodiment of the invention, a substrate is moved bydetecting the presence or absence of the substrate in the light-shieldedstate using a sensor between the step of polishing and removing aconductive film and the step of cleaning, or after the step of cleaning.

In the one embodiment of the invention, a semiconductor device isprovided which can suppress the occurrence of defects due to thephotocorrosion.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view showing the structure of asemiconductor device according to a first embodiment of the invention;

FIGS. 2A and 2B are diagrams for explaining a method for forming amultilayer interconnection layer;

FIG. 3 is another diagram for explaining the method for forming amultilayer interconnection layer;

FIG. 4 is a schematic plan view showing the structure of a semiconductormanufacturing apparatus;

FIG. 5 is a cross-sectional view showing the structure of a cleaningmechanism included in the semiconductor manufacturing apparatus;

FIG. 6 is a diagram showing the position of a substrate detector;

FIG. 7 is a diagram showing the arrangement of an infrared sensor;

FIG. 8 is a diagram for explaining the arrangement of an ultrasonicsensor;

FIG. 9 is a plan view showing the structure of a semiconductormanufacturing apparatus according to a fourth embodiment of theinvention;

FIG. 10 is a longitudinal cross-sectional view for explaining thestructure of a cleaning room;

FIG. 11 is a diagram showing the position of an infrared sensor (orultrasonic sensor) in a cleaning mechanism shown in FIG. 10;

FIGS. 12A and 12B are diagrams for explaining a manufacturing method ofan Al wiring layer in a fifth embodiment; and

FIGS. 13A and 13B are other diagrams for explaining the manufacturingmethod of the Al wiring layer in the fifth embodiment.

DETAILED DESCRIPTION

In the following, preferred embodiments of the present invention will bedescribed with reference to the accompanying drawings. Whereverpossible, the same reference numerals will be used through the drawingsto refer to the same or like parts, and thus a description thereof willbe omitted below.

First Embodiment

FIG. 1 shows a cross-sectional view of the structure of a semiconductordevice SD according to a first embodiment of the invention. An elementisolation film STI and a transistor are formed at a substrate SUB. Theelement isolation film STI serves to isolate a region where thetransistor is formed (element formation region) from other regions. Theelement isolation film STI is formed, for example, by a STI method, butmay be formed by a LOCOS method.

The transistor is formed using a well WL formed in the substrate SUB. Inthe well WL, a source region SOU and a drain region DRN of thetransistor are formed. The source layer SOU and the drain region DRN arean impurity region of an opposite conduction type to that of the wellWL. A gate insulating film GINS and a gate electrode GE are stacked inthat order in a region sandwiched between the source region SOU and thedrain region DRN over the surface of the substrate SUB in the planarview. The gate insulating film GINS is, for example, a silicon oxidefilm, but may be formed of an insulating film other than the siliconoxide film, for example, a material having a higher dielectric constantthan that of silicon oxide. The gate electrode GE is formed of, forexample, polysilicon, but may be formed of other conductive materials,including metal, such as TiN.

When the gate electrode GE is formed of polysilicon, a silicide SIL isformed over the gate electrode GE. The silicide SIL is also formed overthe source layer SOU and the drain region DRN.

A multilayer interconnection layer is formed over the substrate SUB. Themultilayer interconnection layer includes insulating layers INSL1 andINSL2. The insulating layer INSL1 is formed over the substrate SUB, andthe insulating layer INSL2 is formed over the insulating layer INSL1.Each of the insulating layers INSL1 and INSL2 serves as an interlayerinsulating film included in the multilayer interconnection layer. In anexample shown in the figure, a wiring INC1 is embedded in a superficiallayer portion of the insulating layer INSL1, and a wiring INC2 isembedded in a superficial layer portion of the insulating layer INSL2.Both wirings INC1 and INC2 each are a copper wiring. The wiring INC2 iscoupled to the wiring INC1 through a via VA embedded in the insulatinglayer INSL2.

The wirings INC1 and INC2 have a barrier metal film BM formed on itsbottom and side surfaces. The barrier metal film BM includes, forexample, a TiN film or TaN film.

A source contact SCON and a drain contact DCON are embedded in theinsulating layer INSL1. The source contact SCON is coupled to the sourceregion SOU. The drain contact DCON is coupled to the drain region DRN.Although not shown, a contact is also embedded in the insulating layerINSL1 to be coupled to the gate electrode GE. The source contact SCON,the drain contact DCON, and the contact coupled to the gate electrode GEare respectively coupled to different wirings INC1.

A contact WCON is also embedded in the insulating layer INSL1. Thecontact WCON is coupled to a high-concentration region HDL formed in thewell WL. The high-concentration region HDL has the same conduction typeas that of the well WL, and has a higher impurity concentration thanthat of the well WL. The high-concentration region HDL is provided forsupplying a reference potential to the well WL. The silicide SIL isformed also in the superficial layer portion of the high-concentrationregion HDL.

A backside film BL is formed on the backside of the substrate SUB. Thebackside film BL is simultaneously formed with the gate electrode GE.Thus, the backside film BL has a layer formed of the same material asthat of the gate electrode GE.

The semiconductor device SD is formed, for example, in the followingway. First, the well WL is formed in the substrate SUB, and further theelement isolation film STI is formed therein. Thus, the elementformation region is isolated. Then, the gate insulating film GINS andthe gate electrode GE are formed in the substrate SUB positioned in theelement formation region.

Next, extension regions for the source layer SOU and the drain regionDRN are formed in the substrate SUB positioned in the element formationregion. Then, sidewalls are formed over the sidewalls of the gateelectrode GE. Thereafter, the source region SOU and the drain region DRNare formed in the substrate SUB positioned in the element formationregion by ion implantation. In this way, a MOS transistor is formed overthe substrate SUB.

The high-concentration region HDL is formed in the substrate SUBpositioned in the element formation region by the ion implantation.

A metal layer for forming a silicide is formed over the gate electrodeGE, the source layer SOU, the drain region DRN, and thehigh-concentration region HDL. Then, the metal layer is subjected toheat treatment. A silicide SIL is formed over the gate electrode GE, thesource layer SOU, the drain region DRN, and the high-concentrationregion HDL. Then, parts of the metal layer not silicided are removed.

Thereafter, the multilayer interconnection layer is formed over theelement isolation film and the MOS transistor.

FIGS. 2 and 3 are diagrams for explaining the method for forming themultilayer interconnection layer. These figures show a method forforming the insulating layer INSL2, the via VA, and the wiring INC2 overthe insulating layer INSL1. The wiring INC1 is embedded in theinsulating layer INSL1. The wiring INC1 is formed by a damascene method.

First, as shown in FIG. 2A, the insulating layer INSL2 is formed overthe insulating film INSL1, for example, by the CVD method. At this time,a connection hole DEP1 (concave portion) and a wiring trench DEP2(concave portion) are formed in the insulating layer INSL2. Theconnection hole DEP1 is a hole adapted to fill in via VA, andpenetrating the insulating layer INSL2. The wiring trench DEP2 is atrench adapted to fill in the wiring INC2, and not penetrating theinsulating layer INSL2. The connection hole DEP1 is provided at a partof the bottom of the wiring trench DEP2.

Then, as shown in FIG. 2B, the barrier metal film BM and seed film areformed over the bottom and side surfaces of the wiring trench DEP2, thebottom and side surfaces of the connection hole DEP1, and the insulatinglayer INSL2 by sputtering. The seed film is, for example, a Cu film.Then, electrolytic plating is performed using the seed film as a mask. Ametal film ML1, for example, a Cu film is formed over the inside of thewiring trench DEP2, the inside of the connection hole DEP1, and theinsulating layer INSL2.

Then, as shown in FIG. 3, the metal film ML1 positioned above theinsulating layer INSL2 is polished with a part thereof removedtherefrom. Thus, the via VA and the wiring INC2 are formed. The barriermetal film BM is provided between the via VA and wiring INC2, and theinsulating layer INSL2. Thereafter, the substrate SUB is cleaned. Thepolishing process and the cleaning process are performed in thelight-shielded state.

FIG. 4 shows a schematic plan view of the structure of a semiconductormanufacturing apparatus SMQ1 used for removing the metal film ML1positioned over the insulating layer INSL2. The semiconductormanufacturing apparatus SMQ1 includes a transfer chamber MC, aprocessing chamber PRC1, and a cleaning mechanism. The cleaningmechanism includes cleaning chambers PRC2, PRC3, PRC4, and PRC5.

The transfer chamber MC is provided with a transfer mechanism ME1. Thetransfer mechanism ME1 returns to the water case VC the substrate SUBprocessed in the cleaning chamber PRC5 while delivering the substrateSUB accommodated in a wafer case VC into the processing chamber PRC1.

The processing chamber PRC1 includes polishing mechanisms PM1 and PM2therein. The polishing mechanism PM1 removes a Cu film positioned overthe insulating layer INSL2 by the CMP method. The polishing mechanismPM2 removes the barrier metal film BM positioned over the insulatinglayer INSL2 by the CMP method. The substrate SUB transferred into theprocessing chamber PRC1 is processed by the polishing mechanism PM1, andthen processed by the polishing mechanism PM2. Then, the substrate SUBprocessed by the polishing mechanism PM2 is transferred to the cleaningchamber PRC2 of the cleaning mechanism.

The transfer of the substrate SUB within the processing chamber PRC1 isperformed by transfer mechanisms ME2 (moving portion) located in theprocessing chamber PRC1. The substrate SUB is transferred from theprocessing chamber PRC1 to the cleaning chamber PRC2 by a transfermechanism ME4 (moving portion) within the processing chamber PRC1. Thetransfer of the substrate SUB within the cleaning chambers PRC2, PRC3,PRC4, and PRC5 is performed by a transfer mechanism ME3 (movingportion).

FIG. 5 shows a cross-sectional view of the structure of the cleaningmechanism included in the semiconductor manufacturing apparatus SMQ1. Asmentioned above, the semiconductor manufacturing apparatus SMQ1 includesthe cleaning chambers PRC2, PRC3, PRC4, and PRC5. The substrate SUB istransferred from the cleaning chamber PRC2 to the cleaning chambersPRC3, PRC4, and PRC5 in that order, and cleaned in the respectivecleaning chambers.

Substrate supporters STG and nozzles NZL1 and NZL2 are provided in thecleaning chambers PRC2, PRC3, and PRC4. The substrate supporters STGhold the substrate SUB. In an example shown in the figure, the substratesupporters STG hold the substrate SUB horizontally. The nozzle NZL1supplies a cleaning liquid or pure water to the surface of the substrateSUB. The nozzle NZL2 supplies a cleaning liquid or pure water to theback surface of the substrate SUB.

Roller brushes RL are provided opposed to the front and back surfaces ofthe substrate SUB in the cleaning chambers PRC2 and PRC3. A pencil brushBRS is provided opposed to the front surface of the substrate SUB in thecleaning chamber PRC4. Both the roller brushes RL and pencil brush BRSare adapted to clean the substrate SUB.

In addition to the substrate supporters STG, nozzles NZL3 and NZL4 areprovided in the cleaning chamber PRC5. The nozzle NZL3 supplies purewater to the surface of the substrate SUB. The nozzle NZL4 suppliesvapor of IPA (isopropyl alcohol) over the surface of the substrate SUBto dry the surface of the substrate SUB.

Each processing chamber included in the semiconductor manufacturingapparatus SMQ1 is shielded from light by a housing HUS (light shieldingmember). Thus, the substrate SUB does not receive any light during bothprocessing and transfer.

The above-mentioned transfer mechanisms ME2, ME3, and ME4 detect therespective positions of the substrate SUB in transferring the substrateSUB. Now, a substrate detector for detecting the position of thesubstrate SUB will be described below.

FIG. 6 shows a diagram of the position of the substrate detector. In anexample shown in the figure, the substrate detectors are respectivelyprovided in the cleaning chambers PRC2, PRC3, PRC4, and PRC5. Thesubstrate detectors may be respectively provided in the polishingmechanisms PM1 and PM2.

Each substrate detector includes a sensor. The sensor can detect theposition of the substrate SUB in the light-shielded state, and thus doesnot need an illuminated light. In the example shown in the figure, sincethe substrate SUB is a silicon substrate, an infrared sensor SNS1 isused as the sensor.

Silicon has a high infrared emissivity. Thus, the substrate detector candetect the presence or absence of the substrate SUB by allowing theinfrared sensor SNS1 to detect the infrared light from the substrateSUB. For example, when a detection value from the infrared sensor SNS1is equal to or more than a reference value in the substrate detector,the wavelength of the infrared light detected by the infrared sensorSNS1 is, for example, in a range of not less than 8 μm nor more than 10μm.

The infrared sensors SNS1 are preferably provided facing the backsurface or side surface of the substrate SUB mounted on the substratesupporters STG. This is because the front surface of the substrate SUBis covered with water or a film made of a cleaning liquid, which reducesthe infrared emissivity at the front surface of the substrate SUB.

In this embodiment described above, the semiconductor manufacturingapparatus SMQ1 is provided with the substrate detectors for detectingthe position of the substrate SUB. The substrate detector can detect thepresent or absence of the substrate SUB in the light-shielded state.Thus, the illuminated light is not necessary in detecting the presenceor absence of the substrate SUB. Thus, when manufacturing thesemiconductor device, the conductive patterns, such as wiring INC2 orvia VA can be prevented from causing photocorrosion. Accordingly, thisembodiment can suppress the occurrence of the defectives due to thephotocorrosion in the semiconductor device.

Second Embodiment

FIG. 7 shows a diagram of the arrangement of the infrared sensor SNS1according to a second embodiment. This embodiment is the same as thefirst embodiment except that the infrared sensor SNS1 is covered with acover member COV1.

In an example shown in the figure, the cover member COV1 is acylindrical member. The cover member COV1 has its upper end covered withan infrared transmissive portion COV2. The infrared transmissive portionCOV2 is formed of material for allowing an infrared light to passtherethrough (for example, polyethylene). The surface of the infraredtransmissive portion COV2 is preferably made water-repellent, andpreferably has an inclined surface (having, for example, a hemisphericalshape). This structure can prevent water from being attached to thesurface of the infrared transmissive portion COV2.

Also, in this embodiment, the semiconductor device can suppress theoccurrence of defects due to the photocorrosion. The infrared sensorSNS1 is covered with the cover member COV1, which can suppress thereduction in detection sensitivity of the substrate SUB due to thepresence of water on the infrared sensor SNS1. The surface of theinfrared transmissive portion COV2 above the cover portion COV1 isadapted not to allow water to be attached thereto, which can furthersuppress the reduction in detection sensitivity of the substrate SUB.

Third Embodiment

A manufacturing method of a semiconductor device in this embodiment isthe same as that of the first embodiment except that the semiconductormanufacturing apparatus SMQ1 includes an ultrasonic sensor SNS2 insteadof the infrared sensor SNS1. The ultrasonic sensor SNS2 includes asource for the ultrasound, and a detection sensor for the ultrasound.

FIG. 8 is a diagram for explaining the arrangement of the ultrasonicsensor SNS2. As shown in the figure, the ultrasonic sensor SNS2 isdisposed above the substrate SUB with its ultrasound emission surfaceoriented upward, and its ultrasound receiving surface oriented downward.In this way, the liquid, such as water, can be prevented from beingattached to the ultrasound emission surface and the ultrasound receivingsurface of the sensor.

When detecting the presence or absence of the substrate SUB, theultrasonic sensor SNS2 emits ultrasound toward the position where thesubstrate SUB is to be positioned. When the ultrasonic sensor SNS2detects a reflective wave of the ultrasound having a certain intensityor higher, the sensor SNS2 determines that the substrate SUB is presentin the position. The ultrasonic sensor SNS2 is preferably vertical tothe substrate SUB. In this way, the detection sensitivity of theultrasonic sensor SN2 for the reflective wave is enhanced.

Also, in this embodiment of the invention, the semiconductor device cansuppress the occurrence of defects due to the photocorrosion.

Fourth Embodiments

FIG. 9 shows a plan view of the structure of a semiconductormanufacturing apparatus SMQ2 used in a manufacturing method of thesemiconductor device in a fourth embodiment of the invention. Thisembodiment is the same as any one of the first to third embodimentsexcept for the use of the semiconductor manufacturing apparatus SMQ2instead of the semiconductor manufacturing apparatus SMQ1.

The semiconductor manufacturing apparatus SMQ2 includes a cleaningmechanism between the transfer chamber MC and the processing chamberPRC1. In addition to the polishing mechanisms PM1 and PM2, a polishingmechanism PM3 is also provided within the processing chamber PRC1. Thetransfer of the substrate SUB within the processing chamber PRC1, andthe transfer of the substrate SUB from the processing chamber PRC1 intothe cleaning mechanism both are performed by a transfer mechanism ME5.

The cleaning mechanism includes a receiving chamber MC2, cleaningchambers PRC6, PRC7, and PRC8, and a drying chamber PRC9. The receivingchamber MC2 receives the substrate SUB from the transfer mechanism ME5in a processing chamber PRC1, and holds the substrate therein. Thetransfer of the substrate SUB in the cleaning mechanism is performedusing a transfer mechanism ME6. The substrate SUB processed by thecleaning mechanism is carried out by use of the transfer mechanismwithin the transfer chamber MC.

FIG. 10 shows a longitudinal cross-sectional view for explaining thestructures of the cleaning chambers PRC6, PRC7, and PRC8, and the dryingchamber PRC9. In each chamber, the substrate support portion STGvertically supports the substrate SUB.

The cleaning chamber PRC6 includes a cleaning tank. The cleaning tank isfilled with a cleaning liquid or pure water. The substrate SUB isimmersed in the cleaning liquid or pure water. The cleaning chambersPRC7 and PRC8 both are provided with nozzles NZL5 and roller brushes RL.The nozzles NZL5 are opposed to both sides of the substrate SUB todischarge the cleaning liquid or pure water therefrom to each surface ofthe substrate SUB. The roller brushes RL serve to clean both sides ofthe substrate SUB.

In the drying chamber PRC9, the substrate SUB processed in the cleaningchamber PRC8 is dried.

FIG. 11 is a diagram showing the position of an infrared sensor SNS1 (orultrasonic sensor SNS2) in the cleaning mechanism shown in FIG. 10. Asmentioned above, the substrate SUB is vertically held in the cleaningmechanism. The infrared sensor SNS1 (or ultrasonic sensor SNS2) isdisposed above or next to the substrate SUB.

The arrangement of the infrared sensors SNS1 (or ultrasonic sensorsSNS2) in the processing chamber PRC1 is the same as that of any one ofthe first to third embodiments.

Also, this embodiment can obtain the same effects as those of the firstto third embodiments.

Fifth Embodiment

A semiconductor device SD of this embodiment is the same as thesemiconductor device SD of the first embodiment except that at least apart of the multilayer interconnection layer is an Al wiring layer.Thus, a manufacturing method of the semiconductor device SD in thisembodiment is the same as that of any one of the first to fourthembodiments except for the presence of a step of forming the Al wiringlayer.

FIGS. 12A and 12B, and 13A and 13B show diagrams for explaining themanufacturing method of the Al wiring layer in this embodiment. A wiringINC3 is formed over an insulating layer INSL3. The wiring INC3 is an Alwiring. The wiring INC3 is formed by selectively removing an Al filmover the insulating layer INSL3.

As shown in FIG. 12A, an insulating layer INSL4 is formed over theinsulating layer INSL3 and wiring INC3, for example, by the CVD method.Then, a connection hole DEP3 is formed in the insulating layer INSL4.The connection hole DEP3 penetrates the insulating layer INSL4. Thewiring INC3 is exposed at the bottom of the connection hole DEP3.

Then, as shown in FIG. 12B, the barrier metal film BM and W film ML2 areformed over the bottom and side surfaces of the connection hole DEP3 andthe insulating layer INSL3. The barrier metal film BM is formed usingthe sputtering method and the W film ML2 is formed using the CVD method.

Then, as shown in FIG. 13A, a part of the W film ML2 positioned abovethe insulating layer INSL4 is removed by polishing. In this way, the viaVA2 is formed. The polishing is performed by use of the semiconductormanufacturing apparatus SMQ1 or SMQ2 described in any one of the firstto fourth embodiments.

Thereafter, as shown in FIG. 13B, an Al film is formed over theinsulating layer INSL4 and the via VA2. Then, the Al film is selectivelyremoved. Thus, the wiring INC4 is formed. The wiring INC4 is coupled tothe wiring INC3 via the via VA2.

In forming the via VA2 in this embodiment, the semiconductormanufacturing apparatus SMQ1 or SMQ2 shown in any one of the first tofourth embodiments is used. Thus, the photocorrosion can be preventedfrom being caused in the barrier metal film BM or W film ML2.Accordingly, this embodiment can suppress the occurrence of thedefectives due to the photocorrosion in the semiconductor device.

The invention made by the inventors has been specifically describedbased on the embodiments. However, it is apparent that the invention isnot limited to the above embodiments, and that various modifications andchanges can be made without departing from the scope of the invention.

What is claimed is:
 1. A method for manufacturing a semiconductor deviceby using a semiconductor manufacturing apparatus, comprising steps of:(a) forming a first wiring over a semiconductor substrate; (b) formingan insulating film over the first wiring; (c) forming, in the insulatingfilm, a hole connected to the first wiring and a trench connected to thehole; (d) forming a conductive film over the insulating film in order tofill in the hole and the trench; (e) polishing the conductive filmoutside the hole and the trench, thereby a second wiring is formed inthe trench and a via is formed in the hole; and (f) cleaning surfaces ofthe insulating film and the second wiring, wherein the step (e) isperformed in a polishing chamber of the semiconductor manufacturingapparatus, wherein the step (f) is performed in a cleaning chamber ofthe semiconductor manufacturing apparatus, wherein, while thesemiconductor substrate is moved from the polishing chamber to thecleaning chamber, the presence of the semiconductor substrate isconfirmed by using an ultrasonic sensor, and wherein the steps (e) and(f) are performed in a light-shielded state.
 2. A method formanufacturing a semiconductor device according to claim 1, wherein theconductive film includes a metal film and a barrier metal film, whereinthe polishing chamber includes a first polishing chamber and a secondpolishing chamber, wherein the metal film is polished in the firstpolishing chamber, and wherein the barrier metal film is polished in thesecond polishing chamber.
 3. A method for manufacturing a semiconductordevice according to claim 2, wherein the metal film is a Cu film.
 4. Amethod for manufacturing a semiconductor device according to claim 1,wherein the step (f) is performed by using pure water.
 5. A method formanufacturing a semiconductor device by using a semiconductormanufacturing apparatus, comprising steps of: (a) forming a first wiringover a semiconductor substrate; (b) forming an insulating film over thefirst wiring; (c) forming, in the insulating film, a hole connected tothe first wiring and a trench connected to the hole; (d) forming aconductive film over the insulating film in order to fill in the holeand the trench; (e) polishing the conductive film outside the hole andthe trench, thereby a second wiring is formed in the trench and a via isformed in the hole; and (f) cleaning surfaces of the insulating film andthe second wiring, wherein the step (e) is performed in a polishingchamber of the semiconductor manufacturing apparatus, wherein the step(f) is performed in a cleaning chamber of the semiconductormanufacturing apparatus, and wherein, while the semiconductor substrateis moved from the polishing chamber to the cleaning chamber, thepresence of the semiconductor substrate is confirmed by using anultrasonic sensor, wherein the conductive film includes a metal film anda barrier metal film, wherein the polishing chamber includes a firstpolishing chamber and a second polishing chamber, wherein the metal filmis polished in the first polishing chamber, and wherein the barriermetal film is polished in the second polishing chamber.
 6. A method ofmanufacturing a semiconductor device according to claim 5, wherein themetal film is a Cu film.
 7. A method of manufacturing a semiconductordevice according to claim 5, wherein the step (f) is performed by usingpure water.